APA Citation

Dechana, A., Thamboon, P., & Boonyawan, D. (2018). Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber.

Chicago Style Citation

Dechana, A., P. Thamboon, and D. Boonyawan. Microwave Remote Plasma Enhanced-atomic Layer Deposition System With Multicusp Confinement Chamber. 2018.

MLA Citation

Dechana, A., P. Thamboon, and D. Boonyawan. Microwave Remote Plasma Enhanced-atomic Layer Deposition System With Multicusp Confinement Chamber. 2018.

Warning: These citations may not always be 100% accurate.