Dechana, A., Thamboon, P., & Boonyawan, D. (2018). Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber.
Chicago Style CitationDechana, A., P. Thamboon, and D. Boonyawan. Microwave Remote Plasma Enhanced-atomic Layer Deposition System With Multicusp Confinement Chamber. 2018.
MLA CitationDechana, A., P. Thamboon, and D. Boonyawan. Microwave Remote Plasma Enhanced-atomic Layer Deposition System With Multicusp Confinement Chamber. 2018.
Warning: These citations may not always be 100% accurate.