Dechana, A., Thamboon, P., & Boonyawan, D. (2018). Microwave remote plasma enhanced-atomic layer deposition system with multicusp confinement chamber.
Chicago Style CitationDechana, A., P. Thamboon, and D. Boonyawan. Microwave Remote Plasma Enhanced-atomic Layer Deposition System With Multicusp Confinement Chamber. 2018.
MLA引文Dechana, A., P. Thamboon, and D. Boonyawan. Microwave Remote Plasma Enhanced-atomic Layer Deposition System With Multicusp Confinement Chamber. 2018.
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