Effect of pre-heating temperature on the characteristics of PZT thin films grown by using a triol sol-gel route
Lead zirconate tilanate (PZT) films with compositions near the morphotropic phase boundary were fabricated on Pt(111)/Ti/SiO2/Si(100) using the triol sol-gel method. The effect of the pre-heating temperature on the phase transformations, microstructures, electrical properties, and ferroelectric prop...
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| Main Authors: | , , , |
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| 格式: | Article |
| 語言: | English |
| 出版: |
2014
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| 在線閱讀: | http://www.scopus.com/inward/record.url?eid=2-s2.0-34547288343&partnerID=40&md5=74df2081ebe40e9f17a5bd79e5571d90 http://cmuir.cmu.ac.th/handle/6653943832/5281 |
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| 總結: | Lead zirconate tilanate (PZT) films with compositions near the morphotropic phase boundary were fabricated on Pt(111)/Ti/SiO2/Si(100) using the triol sol-gel method. The effect of the pre-heating temperature on the phase transformations, microstructures, electrical properties, and ferroelectric properties of the PZT thin films was investigated. Randomly oriented PZT thin films pre-heated at 400°C for 10 min and annealed at 600°C for 30 min showed well-defined ferroelectric hysteresis loops with a remnant polarization of 26.57 μC/cm2 and a coercive field of 115.42 kV/cm. The dielectric constant and dielectric loss of the PZT films were 621 and 0.0395, respectively. The microstructures of the thin films are dense, crack-free, and homogeneous with fine grains about 15-20 nm in size. © World Scientific Publishing Company. |
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