Shin, K. S., Sahu, B. B., Han, J. G., & Hori, M. (2018). Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering.
استشهاد بنمط شيكاغوShin, Kyung Sik, Bibhuti Bhusan Sahu, Jeon Geon Han, و Masaru Hori. Effectiveness of Hydrogen Dilution for Designing Amorphous to Crystalline Si Thin Film in Inductively Coupled Plasma Assisted Magnetron Sputtering. 2018.
MLA استشهادShin, Kyung Sik, Bibhuti Bhusan Sahu, Jeon Geon Han, و Masaru Hori. Effectiveness of Hydrogen Dilution for Designing Amorphous to Crystalline Si Thin Film in Inductively Coupled Plasma Assisted Magnetron Sputtering. 2018.
تحذير: قد لا تكون هذه الاستشهادات دائما دقيقة بنسبة 100%.