Shin, K. S., Sahu, B. B., Han, J. G., & Hori, M. (2018). Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering.
Chicago Style CitationShin, Kyung Sik, Bibhuti Bhusan Sahu, Jeon Geon Han, and Masaru Hori. Effectiveness of Hydrogen Dilution for Designing Amorphous to Crystalline Si Thin Film in Inductively Coupled Plasma Assisted Magnetron Sputtering. 2018.
MLA CitationShin, Kyung Sik, Bibhuti Bhusan Sahu, Jeon Geon Han, and Masaru Hori. Effectiveness of Hydrogen Dilution for Designing Amorphous to Crystalline Si Thin Film in Inductively Coupled Plasma Assisted Magnetron Sputtering. 2018.
Warning: These citations may not always be 100% accurate.