Shin, K. S., Sahu, B. B., Han, J. G., & Hori, M. (2018). Effectiveness of hydrogen dilution for designing amorphous to crystalline Si thin film in inductively coupled plasma assisted magnetron sputtering.
Chicago Style CitationShin, Kyung Sik, Bibhuti Bhusan Sahu, Jeon Geon Han, and Masaru Hori. Effectiveness of Hydrogen Dilution for Designing Amorphous to Crystalline Si Thin Film in Inductively Coupled Plasma Assisted Magnetron Sputtering. 2018.
MLA引文Shin, Kyung Sik, Bibhuti Bhusan Sahu, Jeon Geon Han, and Masaru Hori. Effectiveness of Hydrogen Dilution for Designing Amorphous to Crystalline Si Thin Film in Inductively Coupled Plasma Assisted Magnetron Sputtering. 2018.
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