Electrical and structural comparison of (100) and (002) oriented AlN thin films deposited by RF magnetron sputtering

by Bakri, A. S., Nafarizal, N., Abu Bakar, A. S., Hasnan, M. M. I. Megat, Raship, N. A., Omar, W. I. Wan, Azman, Z., Ali, R. A. Mohamed, Abd Majid, Wan Haliza, Ahmad, M. K., Aldalbahi, A.
Published 2022