Multi-phase structured silicon carbon nitride thin films prepared by hot-wire chemical vapour deposition

by Badaruddin, M.R., Muhamad, M.R., Rahman, S.A.
Published 2011

Low-pressure synthesis and characterization of multiphase SiC by HWCVD using CH4/SiH4

by Tehrani, F.S., Badaruddin, M.R., Rahbari, R.G., Muhamad, M.R., Rahman, S.A.
Published 2012