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Badaruddin, R.
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Badaruddin, R.
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Badaruddin, R.
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Multi-phase structured hydrogenated amorphous silicon carbon nitride thin films grown by plasma enhanced chemical vapour deposition
by
Abdul Rahman, M.A.
,
Chiu, W.S.
,
Haw, C.Y.
,
Badaruddin
,
R
.
,
Tehrani, F.S.
,
Rusop, M.
,
Khiew, P.
,
Rahman, S.A.
Published 2017
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