Laminated metal gate electrode with tunable work function for advanced CMOS

by Bae, S.H., Bai, W.P., Wen, H.C., Mathew, S., Bera, L.K., Balasubramanian, N., Yamada, N., Li, M.F., Kwong, D.L.
Published 2014

Three-layer laminated metal gate electrodes with tunable work functions for CMOS applications

by Bai, W.P., Bae, S.H., Wen, H.C., Mathew, S., Bera, L.K., Balasubramanian, N., Yamada, N., Li, M.F., Kwong, D.-L.
Published 2014