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Bourdillon, Antony
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Bourdillon, Antony
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Bourdillon, Antony
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1
ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITION
by
VLADIMIRSKY, YULI
,
BOURDILLON
,
ANTONY
Published 2012
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2
ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITION
by
VLADIMIRSKY, YULI
,
BOURDILLON
,
ANTONY
Published 2012
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3
ULTRA HIGH RESOLUTION LITHOGRAPHIC IMAGING AND PRINTING AND DEFECT REDUCTION BY EXPOSURE NEAR THE CRITICAL CONDITION
by
VLADIMIRSKY, YULI
,
BOURDILLON
,
ANTONY
Published 2012
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4
Ultra high resolution lithographic imaging and printing and defect reduction by exposure near the critical condition utilizing fresnel diffraction
by
VLADIMIRSKY, YULI
,
BOURDILLON
,
ANTONY
Published 2012
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5
Demagnification-by-bias in proximity X-ray lithography
by
Ren, Kong Jong
,
Leonard, Quinn
,
Vladimirsky, Yuli
,
Bourdillon
,
Antony
Published 2014
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