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1

Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

by Chen, Bangtao
Published 2010

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Theses and Dissertations

2

Au-In-based hermetic sealing for MEMS packaging for down-hole application

Au-In-based hermetic sealing for MEMS packaging for down-hole application

by Vivek, Chidambaram, Chen, Bangtao, Gan, Chee Lip, Daniel, Rhee Min Woo
Published 2014

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