Development of silicon-on-glass electrostatic microactuators with a high aspect ratio and vertical configuration

由 Chen, Bangtao
出版 2010

Au-In-based hermetic sealing for MEMS packaging for down-hole application

由 Vivek, Chidambaram, Chen, Bangtao, Gan, Chee Lip, Daniel, Rhee Min Woo
出版 2014