Heteroepitaxial growth of an ultrathin β-Ga2O3 film on a sapphire substrate using mist CVD with fluid flow modeling

by Mondal, Abhay Kumar, Deivasigamani, Revathy, Ping, Loh Kean, Haniff, Muhammad Aniq Shazni Mohammad, Goh, Boon Tong, Horng, Ray Hua, Mohamed, Mohd Ambri
Published 2022