Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics

بواسطة Forleo, Angiola, Francioso, Luca, Capone, Simonetta, Casino, Flavio, Siciliano, Pietro, Tan, Ooi Kiang, Huang, Hui
منشور في 2011