Annealing of an AlN buffer layer in N2-CO for growth of a high-quality AlN film on sapphire

by Miyake, Hideto, Nishio, Gou, Suzuki, Shuhei, Hiramatsu, Kazumasa, Fukuyama, Hiroyuki, Kaur, Jesbains, Kuwano, Noriyuki
Published 2016

Reduction of dislocation density of aluminium nitride buffer layer grown on sapphire substrate

by Jesbains, K., Kuwano, Noriyuki, Jamaludin, Khairur Rijal, Miyake, Hideto, Hiramatsu, Kazumasa, Suzuki, Shuhei, Mitsuhara, Masatoshi, Hata, S., Soejima, Youhei
Published 2016