Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process

by Kerdlapee,P., Wisitsoraat,A., Phokaratkul,D., Leksakul,K., Phatthanakun,R., Tuantranont,A.
Published 2015

Low cost and high resolution X-ray lithography for fabrication of microactuator

by Kerdlapee P., Wisitsoraat A., Leksakul K., Phokharatku D., Phatthanakun R., Tuantranont A.
Published 2017