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Influence of dissipation power in copper sputtering plasma measured by optical emission spectroscopy
by Kevin, Low, Nafarizal, Nayan, Prof. Madya Dr., Mohd Zainizan, Sahdan, Dr., Abd Kadir, Mahamad, Dr., Mohd Khairul, Ahmad, Dr., Ali Yeon, Md Shakaff, Prof. Dr., Ammar, Zakaria, Fathinul Syahir, Ahmad Sa'ad, Ahmad Faizal, Mohd Zain
Published 2014
Get full textPublished 2014
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