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Kimihiro, Sasaki
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Kimihiro, Sasaki
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Fabrication and evaluations of PZT thin films by RF reactive sputtering using solid oxygen-source / Sukreen Hana Herman, Kimihiro Sasaki and Tomonobu Hata
by
Herman, Sukreen Hana
,
Kimihiro
,
Sasaki
,
Tomonobu, Hata
Published 2004
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