Effects of point defect healing on phosphorus implanted germanium n+/p junction and its thermal stability

بواسطة Lee, In-Yeal, Shin, Jeong-hun, Choi, Daebeom, Baek, Jung Woo, Heo, Jonggon, Park, Wonkyu, Leem, Jung Woo, Yu, Jae Su, Jung, Woo-Shik, Saraswat, Krishna, Park, Jin-Hong, Shim, Jaewoo
منشور في 2013