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Lenain, B.
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Lenain, B.
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Lenain, B.
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Effects of Al-C ion-implantation and annealing in epitaxial 6H-SiC studied by structural and optical techniques
by
Feng, Z.C.
,
Ferguson, I.
,
Stall, R.A.
,
Li, K.
,
Shi, Y.
,
Singh, H.
,
Tone, K.
,
Zhao, J.H.
,
Wee, A.T.S.
,
Tan, K.L.
,
Adar, F.
,
Lenain
,
B
.
Published 2014
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