PIC-integrable, uniformly 056%-tensile strained Ge-on-insulator photodiodes enabled by recessed SiNx stressor

by Lin, Yiding, Ma, Danhao, Lee, Kwang Hong, Wen, Rui-Tao, Syaranamual, Govindo, Kimerling, Lionel, Tan, Chuan Seng, Michel, Jurgen
Published 2021