Effects of radio-frequency power on structural properties and morphology of AlGaN thin film prepared by co-sputtering technique

by Othman, Nur Afiqah, Nayan, Nafarizal, Mustafa, Mohd. Kamarulzaki, Azman, Zulkifli, Megat Hasnan, Megat Muhammad Ikhsan, Jaafar, Siti Noryasmin, Bakri, Anis Suhaili, Mamat, Mohd. Hafiz, Mohd. Yusop, Mohd. Zamri, Abu Bakar, Ahmad Shuhaimi, Ahmad, Mohd. Yazid
Published 2021

Structural and morphological properties of AlGaN thin films prepared by co-sputtering technique

by Othman, Nur Afiqah, Nayan, Nafarizal, Mustafa, Mohd. Kamarulzaki, Azman, Zulkifli, Megat Hasnan, Megat Muhammad Ikhsan, Bakri, Anis Suhaili, Jaffar, Siti Noryasmin, Abu Bakar, Ahmad Shuhaimi, Mamat, Mohd. Hafiz, Mohd. Yusop, Mohd. Zamri, Ahmad, Mohd. Yazid
Published 2021

Structural and morphological properties of AlGaN thin films prepared by co-sputtering technique

by Othman, Nur Afiqah, Nayan, Nafarizal, Mustafa, Mohd Kamarulzaki, Azman, Zulkifli, Megat Hasnan, Megat Muhammad Ikhsan, Bakri, Anis Suhaili, Jaffar, Siti Noryasmin, Abu Bakar, Ahmad Shuhaimi, Mamat, Mohd Hafiz, Mohd Yusop, Mohd Zamri, Ahmad, Mohd Yazid
Published 2021