Polygonal pyramidal reflector-based micromachined microscanners for bioimaging

by Mu, X., Neo, D.W.K., Yu, H., Senthil Kumar, A., Chau, F.S.
Published 2014

MEMS electrostatic double T-shaped spring mechanism for circumferential scanning

by Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, D.W.K., Kumar, A.S., Chau, F.S.
Published 2014