Growth kinetic and composition of the interfacial layer for RF sputtering Al2O3 layer on germanium

by Sahari, S.K., Kashif, M., Sutan, N.M., Embong, Z., Nik Zaini Fathi, N.A.F., Hamzah, A.A., Sapawi, R., Majlis, B.Y., Ahmad, I.
Published 2017

Growth kinetic and composition of the interfacial layer for RF sputtering Al2O3 layer on germanium

by Sahari S.K., Kashif M., Sutan N.M., Embong Z., Nik Zaini Fathi N.A.F., Hamzah A.A., Sapawi R., Majlis B.Y., Ahmad I.
Published 2023