Simulation study of convex corner undercutting in KOH and TMAH for a MEMS piezoresistive accelerometer

by Yusof, N., Soin, N., Noorakma, A.C.W.
Published 2016

Effect of beams structures on dynamic behavior of piezoresistive accelerometer sensors

by Yusof, N., Soin, N., Noorakma, A.C.W.
Published 2017

Design and analysis of MEMS high sensitive capacitive pressure sensor

by Ali, M., Soin, N., Noorakma, A.C.W., Yusof, N., Hatta, S.F.W.M.
Published 2016