Optimization of ion implantation using trim software for the formation of shallow n+/p junction in germanium substrate

by Abdul Aziz, Umar, Nur Farhana Arissa, Nur Farhana Arissa, Aid, Siti Rahmah, Yahaya, Hafizal, Centeno, Anthony, Matsumoto, Satoru, Uedono, Akira, Mcphail, David
Published 2015