ULTRA-THIN TANTALUM OXIDE FOR 256 MB DRAMS

by PERERA MERINNAGE TAMARA CHANDIMA
Published 2020

Superiority of N2O plasma annealing over O2 plasma annealing for amorphous tantalum pentoxide (Ta2O5) films

by Lau, Wai Shing, Perera, Merinnage Tamara Chandima, Babu, Premila, Ow, Aik Keong, Han, Taejoon, Sandler, Nathan P., Tung, Chih Hang, Sheng, Tan Tsu, Chu, Paul K.
Published 2014