Fabrication of 3C-silicon carbide membranes: Towards development of novel microdevices for biomedical applications

by Nashrul Fazli, Mohd Nasir, Charan, M. Shah, Leech, Patrick William, Reeves, Geoffrey K., Pirogova, Elena, Istivan, Taghrid S, Tanner, Philip G., Holland, Anthony Stephen
Published 2012