Design and optimization of lithographic materials and processing

by SOO CHOI PHENG
Published 2010

Method to enhance global planarization of silicon oxide surface for IC device fabrication

by SOO, CHOI PHENG, CHAN, LAP
Published 2012

Simplified dual damascene process utilizing PPMSO as an insulator layer

by SOO, CHOI PHENG, LOH, WYE BOON, CHAN, LAP
Published 2012

Formation of air gap structures for inter-metal dielectric application

by SOO, CHOI PHENG, TEE, KHENG CHOK, ONG, KOK KENG, CHAN, LAP
Published 2012