Aluminium thin film surface modification via low-pressure and atmospheric-pressure argon plasma exposure

by Samad, M.I.A., Nayan, N., Abu Bakar, Ahmad Shuhaimi, Wageh, A.H., Hamzah, A.A., Latif, R.
Published 2022

Effects of argon/nitrogen sputtering gas on the microstructural, crystallographic and piezoelectric properties of AlN thin films

by Samad M.I.A., Noor M.M., Nayan N., Bakar A.S.A., Mansor M., Zuhdi A.W.M., Hamzah A.A., Latif R.
Published 2024