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Schaper, Charles D.
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Schaper, Charles D.
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Schaper, Charles D.
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Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
by
Ho, Weng Khuen
,
Tay, Arthur
,
Schaper
,
Charles
D
.
Published 2014
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2
Optimal control strategy using linear programming for load disturbance compensation in thermal processing systems
by
Ho, Weng Khuen
,
Tay, Arthur
,
Schaper
,
Charles
D
.
Published 2014
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3
Optimal control of conductive heating systems for microelectronics processing of silicon wafers and quartz photomasks
by
Ho, Weng Khuen
,
Tay, Arthur
,
Schaper
,
Charles
D
.
Published 2014
Get full text
Conference or Workshop Item
Save to List
Saved in:
4
Optimal control strategy using linear programming for load disturbance compensation in thermal processing systems
by
Ho, Weng Khuen
,
Tay, Arthur
,
Schaper
,
Charles
D
.
Published 2014
Get full text
Conference or Workshop Item
Save to List
Saved in:
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