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Shinano, Shunji
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Shinano, Shunji
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Shinano, Shunji
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Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application
by
Zainal Ariffin, Nur Hamizah
,
Yahaya, Hafizal
,
Shinano
,
Shunji
,
Tanaka, Satoru
,
Hashim, Abdul Manaf
Published 2015
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