Realization of three-dimensionally MEMS stacked comb structures for microactuators using low-temperature multi-wafer bonding with self-alignment techniques in CMOS-compatible proce...

由 Teo, Adrian J. T., Li, Holden King Ho
出版 2022

Design optimization for an SOI MOEMS accelerometer

由 Teo, Adrian J. T., Li, Holden King-Ho, Tan, Say Hwa, Yoon, Yong-Jin
出版 2019

Core-shell particles: from fabrication methods to diverse manipulation techniques

由 Yadav, Ajeet Singh, Tran, Du Tuan, Teo, Adrian J. T., Dai, Yuchen, Galogahi, Fariba Malekpour, Ooi, Chin Hong, Nguyen, Nam-Trung
出版 2023