Realization of three-dimensionally MEMS stacked comb structures for microactuators using low-temperature multi-wafer bonding with self-alignment techniques in CMOS-compatible proce...

بواسطة Teo, Adrian J. T., Li, Holden King Ho
منشور في 2022

Design optimization for an SOI MOEMS accelerometer

بواسطة Teo, Adrian J. T., Li, Holden King-Ho, Tan, Say Hwa, Yoon, Yong-Jin
منشور في 2019

Core-shell particles: from fabrication methods to diverse manipulation techniques

بواسطة Yadav, Ajeet Singh, Tran, Du Tuan, Teo, Adrian J. T., Dai, Yuchen, Galogahi, Fariba Malekpour, Ooi, Chin Hong, Nguyen, Nam-Trung
منشور في 2023