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Toubal, Malika
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Toubal, Malika
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Toubal, Malika
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3D FEM analysis of high-frequency ALN-based PMUT arrays on cavity SOI
by
Liu, Wenjuan
,
He, Leming
,
Wang, Xubo
,
Zhou, Jia
,
Xu, Weijiang
,
Smagin, Nikolay
,
Toubal
,
Malika
,
Yu, Hao
,
Gu, Yuandong
,
Xu, Jinghui
,
Remiens, Denis
,
Ren, Junyan
Published 2020
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