Novel fabrication techniques for silicon photonics

by Reed, G.T., Yang, P.Y., Headley, W.R., Waugh, P.M., Mashanovich, G.Z., Thomson, D., Gwilliam, R.M., Teo, E.J., Blackwood, D.J., Breese, M.B.H., Bettiol, A.A.
Published 2014