THE SIMULATION OF FLUID FLOW AT MICROELECTROMECHANICAL SYSTEM USING LATTICE BOLTZMANN EQUATION
Several studies have been conducted to simulate the micro scale fluid flow in rarefied gas. In this regime the continuum hypothesis of Navier-Stokes equations begins to break down as the length scale of the flow domain reach the mean free path of the molecule. The distinctly different physics compar...
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Format: | Theses |
Language: | Indonesia |
Online Access: | https://digilib.itb.ac.id/gdl/view/12797 |
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Institution: | Institut Teknologi Bandung |
Language: | Indonesia |