#TITLE_ALTERNATIVE#
VLS (Vapor-Liquid-Solid) mechanism is one of the most important mechanism in the fabrication of nanomaterial structure. Growth of catalyzed SiNW uses this mechanism. Growth of catalyst thin film is the initial step of this mechanism, which then followed by nanocluster formation by annealing process....
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/15089 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |