#TITLE_ALTERNATIVE#

• Main Author: HADI PRAMONO (NIM : 10208042); Pembimbing : Dr. Euis Sustini, M.Si.; Dr. Fatimah A. Noor, M.Si., IMAM
• Format: Final Project
• Language: Indonesia
• Online Access: https://digilib.itb.ac.id/gdl/view/16020
• Institution: Institut Teknologi Bandung

Giving a doping to ZnO affect the morphology and crystallinity results of the mixture. That parameter is related to the lattice constant of the crystal structure ZnO. Lattice constants are a certain distance between the atoms making up the crystal. In this experiments (Final 2), it will look for the relationship between the percentage of the mixture with a lattice constant values. This experiments used Al2O3 and In2O3 for doping. In previous experiments (Final 1) have conducted a deposition of a thin layer using a sputtering target of pure ZnO and glass substrates. However, after characterization, the glass is not grown ZnO layer. Possible causes that occurs is a less suitable substrate <br /> <br /> <br /> preparation for sputtering deposition. For this experiments is intended as a preliminary study for the creation targets TCO (transparent conducting oxides) made from a mixture <br /> <br /> <br /> of ZnO with Al2O3 and In2O3.