DEPOSISI FILM TIPIS FERROELEKTRIK DENGAN METODE PULSE LASER DEPOSITION DAN KARAKTERISASINYA
Deposition of Bao3Sr07TiO3 ferroelectric thin films on Pt/SiO 2/Si and Si substrate at temperature of 650 °C, 675 °C and 700 °C using pulse laser deposition method have been done. Preparation of Bao.3Sro,TiO3 ferroelectric target start from mixing of BaCO3, SrCO3 and TiO2 by solid state reaction,...
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| Format: | Theses |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/2027 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |