STUDY OF GRAPHENE GROWTH BY HWC-VHF-PECVD METHOD USING ANNEALED SILVER FILM CATALYST
In this research, graphene growth on the annealed silver thin film by hot wire cell very high frequency plasma enhanced chemical vapour deposition (HWC-PECVD) <br /> <br /> <br /> method was done. Previously, it was prepared catalyst...
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Format: | Theses |
Language: | Indonesia |
Online Access: | https://digilib.itb.ac.id/gdl/view/20857 |
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Institution: | Institut Teknologi Bandung |
Language: | Indonesia |