PENUMBUHAN FILM TIPIS SUPERKONDUKTOR NDBA2CU3O7-8 (100) DENGAN METODE ON-AXIS DC UNBALANCED MAGNETRON SPUTTERING DAN KARAKTERISASINYA

• Main Author: SUMPONO, IMAM
• Format: Theses
• Language: Indonesia
• Online Access: https://digilib.itb.ac.id/gdl/view/2101
• Institution: Institut Teknologi Bandung

Bulk superconductor NdBa2Cu3O7_s have been sintesized by solid state reaction and thin film superconductor NdBa2Cu3O7 _a have been growth by on-axis dc unbalanced magnetroq sputtering method on MgO (100) substrate. Sample was characterized by XRD, SEM-EDAX and L measurement. The first bulk (bulk-1) was sintesized with treatment ; powder calsination 920°C for 48 hours, sintering 1000°C for 48 hours and annealing 500°C for 10 hours. While the second bulk (bulk-2) with treatment ; powder calsination 920°C for 36 hours, sintering 1000°C for 36 hours and annealing 500°C for 30 hours. Bulk-1 and bulk-2 have critical temperature (Tc ) at 80,00 K and 88,90 K respectively. Target sintesize product was used for deposition of thin film superconductor NdBa2Cu3Oi_8 / MgO(100). Film-1 and film-2 were deposited with a difference plasma power paramater 46 W and 57 W respectively and the other same paramaters ; Ar : 02 = 120 sccm : 20 sccm and substrate temperature 700 °C . Deposition rate for 46 W and 57 W plasma power is 20,07 A / minute and 45,99A / minute respectively. Thin film that was deposited by relative high plasma power yield low quality thin film indicated by XRD spectrum, micro structure by SEM and lower T~. Film-1 and film-2 have critical temperature at 95,19 K and 91,61 K respectively.