INFLUENCE OF HIDROGEN PLASMA ANNEALING ON THE STRUCTURAL AND OPTICAL PROPERTIES OF Y:ZrO2 MATERIAL

• Main Author: DWI WULANDARI (NIM : 10212069) , RETNO
• Format: Final Project
• Language: Indonesia
• Online Access: https://digilib.itb.ac.id/gdl/view/23908
• Institution: Institut Teknologi Bandung

A study about influence of Hydrogen Plasma Annealing on the structure and optical properties of material ZrO2 doped by yttrium (Y:ZrO2) has been performed. The high voltage supplied to hidrogen atom that is ionized and produce plasma. Then this hidrogen plasma bombard the target. These materials were characterized using atomic force microscopy (AFM), fourier transform infrared (FTIR), x-rays diffraction (XRD) and spectroscopic ellipsometry (SE). According to AFM result, there were no significant changes in the morphology of Y:ZrO2 before and after the HPA treatment. This indicates that the HPA treatment did not significantly affect tthe crystal structure. The FTIR characterization results show that there are additional O-H bonds at wavenumber of 2360 cm-1 in Y:ZrO2 after the HPA treatment was performed. The analysis of the optical properties of the material was performed using SE at the energy range from 1.2 eV to 6.5 eV. Room-temperature SE data of (symbol) (amplitude ratio) and (symbol) (phase difference) were taken at one point with different incident angles. Optical constants were obtained for the incidence angles of 60o, 70o, and 80o. After the HPA treatment, there is a decrease on transparency level of the sample surface. This is shown from the spectral transmittance intensity which is decreased after the HPA treatment. This study allows us to predict the role of hidrogen atoms on structural and optical properties of Y:ZrO2 material.