Design and Control of Piezoelectric-based Microactuators Using Inverse Hysteresis Model

Piezoelectric micro actuator is used for micro positioning technology. Using the inverse of piezoelectric effect, can develop an actuator for small displacement with high resolution for several micron range. However, the piezoelectric has the disadvantage of hysteresis nonlinearity. The relation bet...

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Bibliographic Details
Main Author: Agung Ariwi Saputro, Indra
Format: Theses
Language:Indonesia
Online Access:https://digilib.itb.ac.id/gdl/view/36273
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Institution: Institut Teknologi Bandung
Language: Indonesia