THE EFFECT OF SN DOPANT ON THE ELECTRICAL PROPERTIES OF THIN FILMS ZNO GROWED BY DC-UNBALANCED MAGNETRON SPUTTERING
This research is purpose to study the effect of 3% Sn doping on ZnO materials and see the electrical properties produced and their potential as optoelectronics. Sn: ZnO (SZO) is grown at RT temperature (SZO-RT) and compared with pure ZnO with the same deposition temperature. Furthermore, SZO has bee...
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| Format: | Theses |
| Language: | Indonesia |
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| Online Access: | https://digilib.itb.ac.id/gdl/view/37882 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |
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