POINT SPREAD FUNCTION ESTIMATION OF ELCTROMAGNETIC LENS SYSTEM ON SCANNING ELECTRON MICROSCOPE
Scanning Electron Microscope (SEM) is an instrument that used to observe the surface of an object up to nanometer scale. Image degradation limits the process of observation and quantification of an object structural detail based on its SEM image. Improving the image quality by upgrading the hardware...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/39709 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |