DESIGN AND IMPLEMENTATION OF SPINNER AND SPRAYER ARM CONTROL SYSTEM OF THE AUTOMATIC WAFER CLEANING SYSTEM
The semiconductor wafer cleaning process is one of the important parts in microelectronics industry. In the process of chip or IC fabrication, the substrate which is a silicon semiconductor wafer has to be in a clean condition before entering the next stages such as oxidation, thin-film layering, li...
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| Format: | Final Project |
| Language: | Indonesia |
| Online Access: | https://digilib.itb.ac.id/gdl/view/41686 |
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| Institution: | Institut Teknologi Bandung |
| Language: | Indonesia |