OPTICAL PROPERTIES ANALYSIS OF FE:ZNO THIN FILM

• Main Author: Fanny
• Format: Final Project
• Language: Indonesia
• Online Access: https://digilib.itb.ac.id/gdl/view/49116
• Institution: Institut Teknologi Bandung

Zinc oxide (ZnO) has a low cost, is easily doped, high stability, non-toxic, and its characteristic in optoelectronic applications can replace Indium Tin Oxide (ITO). The administration of Fe doping to ZnO can improve the quality of crystallinity or obtain better optical, electrical, or ferromagnetic properties. This study aims to study the effect of Fe doping on the structure and orientation of ZnO crystals, as well as the resulting optical properties. In a previous study, a thin layer of Fe: ZnO was grown on a Si substrate (100) using the DC-Unbalanced Magnetron Sputtering method with a Fe content of 0.6%, 1.2%, and 9.1%. To determine the effects of doping, each sample was characterized using a Scanning Electron Microscope (SEM), Energy Dispersive X-ray (EDX), X-ray diffraction (XRD), Photoluminescence (PL), and Spectroscopic Ellipsometry (SE). SEM and EDX characterization were used to analyze the morphology and composition of the atoms. While XRD characterization is used to analyze the crystal structure. Furthermore, PL and SE measurements were taken. From the results of PL characterization can be known as the optical properties of the material that can be used to study defects found in crystals such as the existence of a vacancy or a substitution. The PL spectrum shows changes in the energy level of point defects in ZnO films due to Fe dopants. Then the SE results provide information about the optical properties of Fe: ZnO through the phase difference and amplitude parameters obtained in data processing using completeEase. The research will focus on analyzing the effect of Fe dopants on the optical properties of Fe: ZnO. The targeted results in this study could potentially be as optoelectronic devices.