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Abstract: <br /> <br /> <br /> <br /> <br /> Visual detection capability becomes an important issue. Limitation of human sensory perception urges sensory technologies to overcome them. Heat and temperature sensors are become important devices to make decision for c...
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Format: | Final Project |
Language: | Indonesia |
Online Access: | https://digilib.itb.ac.id/gdl/view/7241 |
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Institution: | Institut Teknologi Bandung |
Language: | Indonesia |
Summary: | Abstract: <br />
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Visual detection capability becomes an important issue. Limitation of human sensory perception urges sensory technologies to overcome them. Heat and temperature sensors are become important devices to make decision for condition that can be detected directly using human eyes, for instance under less light intensity or dangerous environment. <br />
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Bolometer is one of popular infrared sensors that widely utilized in public and military application, especially as sensing element in thermal detector camera. This final project designed and simulated Bolometer structure using CoventorWare simulator. Bolometer structure was built using surface micromachining technology which is part of Micro Electro Mechanical System (MEMS) technologies. It allows Bolometer structure build above silicon substrate, so that it has high sensitivity toward infrared radiation. <br />
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